Surface Science Western has a mechanical stylus surface profiler that measures the surface topographical features by maintaining a selectable constant contact force so that the stylus has to go up and down according to the surface profiles. The stylus comprises a tungsten tip with a diamond embedded at its apex (radius ~ 2 micrometers). The contact force between the stylus and the sample surface is sensed by a capacitance displacement sensor. The applied stylus force can be selected within 1 – 50 mg (or 10 – 50 μN). The profiler has three height dynamic ranges, allowing us to measure height difference from 5 nm to 0.3 mm. The instrument can handle samples as large as 8 inches in diameter and as heavy as 2 kg.
The applications of the instrument cover roughness and waviness estimation and step height measurement. By scanning a series of tracings, one also obtains a 3D topographic image of the surface, from which any scan lines can be isolated for analysis.
KLA Tencor P-10 Surface Profiler
- Roughness quantification for surface finishing evaluation
- SIMS crater depth measurement
- Thickness measurement for thin metal and polymer films
- Radius of curvature
- 3D surface morphology for detection of defects and corrosion
Selected Applications in Industry:
- A standard grating sample (26 nm height and 3.0 μm pitch)
- Measurement of thread of a screw (millimeter scale)
- Wearing on a steel modeling device (variation in roughness on different areas)
- Membrane surface and fabric surface
- Counter top defects
- SIMS sputter rate estimation